@misc{indiciaeb9e8cc3f1c3b,
  title = {Nanophotonic inspection of deep-subwavelength integrated optoelectronic chips},
  author = {Ying Che and Tianyue Zhang and Xiaowei Liu and Dejiao Hu and Shichao Song and Yan Cai and Yaoyu Cao and Jie Zhang and Shi-Wei Chu and Xiangping Li},
  year = {2024},
  url = {https://arxiv.org/abs/2404.02528},
  note = {Source identifier: 2404.02528}
}