@misc{indiciae0e9f4131f471, title = {AlN/Si interface engineering to mitigate RF losses in MOCVD grown GaN-on-Si substrates}, author = {Pieter Cardinael and Sachin Yadav and Herwig Hahn and Ming Zhao and Sourish Banerjee and Babak Kazemi Esfeh and Christof Mauder and Barry O Sullivan and Uthayasankaran Peralagu and Anurag Vohra and Robert Langer and Nadine Collaert and Bertrand Parvais and Jean-Pierre Raskin}, year = {2024}, doi = {10.1063/5.0212145}, url = {https://arxiv.org/abs/2404.02707}, note = {Source identifier: 2404.02707} }