TY  - RPRT
TI  - Towards Improved Semiconductor Defect Inspection for high-NA EUVL based on SEMI-SuperYOLO-NAS
AU  - Ying-Lin Chen
AU  - Jacob Deforce
AU  - Vic De Ridder
AU  - Bappaditya Dey
AU  - Victor Blanco
AU  - Sandip Halder
AU  - Philippe Leray
PY  - 2024
UR  - https://arxiv.org/abs/2404.05862
ID  - 2404.05862
ER  -