@misc{indiciae3e62bb660568,
  title = {Using a coupled optical and electrical monitoring method to follow the R-HiPIMS TiO\$\_2\$ deposition process drifts},
  author = {D Boivin and R Jean-Marie-Désirée and A Najah and S Cuynet and L de Poucques},
  year = {2024},
  doi = {10.1088/1402-4896/ad3302},
  url = {https://arxiv.org/abs/2404.06084},
  note = {Source identifier: 2404.06084}
}