@misc{indiciae58a06e4a3c1e, title = {Iterative Cluster Harvesting for Wafer Map Defect Patterns}, author = {Alina Pleli and Simon Baeuerle and Michel Janus and Jonas Barth and Ralf Mikut and Hendrik P. A. Lensch}, year = {2024}, url = {https://arxiv.org/abs/2404.15436}, note = {Source identifier: 2404.15436} }