@misc{indiciae3dd9ff6cad92, title = {Programmable activation of quantum emitters in high-purity silicon with focused carbon ion beams}, author = {M. Hollenbach and N. Klingner and P. Mazarov and W. Pilz and A. Nadzeyka and F. Mayer and N. V. Abrosimov and L. Bischoff and G. Hlawacek and M. Helm and G. V. Astakhov}, year = {2024}, doi = {10.1002/qute.202400184}, url = {https://arxiv.org/abs/2404.19592}, note = {Source identifier: 2404.19592} }