@misc{indiciaee26cd3077582,
  title = {Deposition of highly-crystalline AlScN thin films using synchronized HiPIMS -- from combinatorial screening to piezoelectric devices},
  author = {Jyotish Patidar and Kerstin Thorwarth and Thorsten Schmitz-Kempen and Roland Kessels and Sebastian Siol},
  year = {2024},
  url = {https://arxiv.org/abs/2405.00210},
  note = {Source identifier: 2405.00210}
}