TY  - RPRT
TI  - Deposition of highly-crystalline AlScN thin films using synchronized HiPIMS -- from combinatorial screening to piezoelectric devices
AU  - Jyotish Patidar
AU  - Kerstin Thorwarth
AU  - Thorsten Schmitz-Kempen
AU  - Roland Kessels
AU  - Sebastian Siol
PY  - 2024
UR  - https://arxiv.org/abs/2405.00210
ID  - 2405.00210
ER  -