TY - RPRT TI - Thermal stability and phase transformation of $α$-, $κ(ε)$-, and $γ$-Ga$_2$O$_3$ thin films to $β$-Ga$_2$O$_3$ under various ambient conditions AU - J. Tang AU - K. Jiang AU - P. Tseng AU - R. C. Kurchin AU - L. M. Porter AU - R. F. Davis PY - 2024 UR - https://arxiv.org/abs/2405.00299 ID - 2405.00299 ER -