@misc{indiciaedf82578a392b, title = {Effect of Helium Ion Implantation on 3C-SiC Nanomechanical String Resonators}, author = {Philipp Bredol and Felix David and Nagesh S. Jagtap and Yannick S. Klaß and Georgy V. Astakhov and Artur Erbe and Eva M. Weig}, year = {2024}, doi = {10.1103/physrevapplied.22.034036}, url = {https://arxiv.org/abs/2405.02035}, note = {Source identifier: 2405.02035} }