@misc{indiciae88aa3a6855a2,
  title = {Cu\$\_x\$Al\$\_\{1-x\}\$ films as Alternatives to Copper for Advanced Interconnect Metallization},
  author = {Jean-Philippe Soulié and Kiroubanand Sankaran and Geoffrey Pourtois and Johan Swerts and Zsolt Tőkei and Christoph Adelmann},
  year = {2024},
  url = {https://arxiv.org/abs/2405.02046},
  note = {Source identifier: 2405.02046}
}