@misc{indiciaee5d008a17ee8,
  title = {Quantum Chemistry Model of Surface Reactions and Kinetic Model of Diamond Growth: Effects of CH3 Radicals and C2H2 Molecules at Low-Temperatures CVD},
  author = {Yuri Barsukov and Igor D. Kaganovich and Mikhail Mokrov and Alexander Khrabry},
  year = {2024},
  url = {https://arxiv.org/abs/2405.03050},
  note = {Source identifier: 2405.03050}
}