TY  - RPRT
TI  - Quantum Chemistry Model of Surface Reactions and Kinetic Model of Diamond Growth: Effects of CH3 Radicals and C2H2 Molecules at Low-Temperatures CVD
AU  - Yuri Barsukov
AU  - Igor D. Kaganovich
AU  - Mikhail Mokrov
AU  - Alexander Khrabry
PY  - 2024
UR  - https://arxiv.org/abs/2405.03050
ID  - 2405.03050
ER  -