@misc{indiciae4675c47ccce8, title = {Bayesian optimization for stable properties amid processing fluctuations in sputter deposition}, author = {Ankit Shrivastava and Matias Kalaswad and Joyce O. Custer and David P. Adams and Habib N. Najm}, year = {2024}, doi = {10.1116/6.0003418}, url = {https://arxiv.org/abs/2405.03092}, note = {Source identifier: 2405.03092} }