TY  - RPRT
TI  - Bayesian optimization for stable properties amid processing fluctuations in sputter deposition
AU  - Ankit Shrivastava
AU  - Matias Kalaswad
AU  - Joyce O. Custer
AU  - David P. Adams
AU  - Habib N. Najm
PY  - 2024
DO  - 10.1116/6.0003418
UR  - https://arxiv.org/abs/2405.03092
ID  - 2405.03092
ER  -