TY  - RPRT
TI  - Direct electron beam writing of silver using a $β$-diketonate precursor: first insights
AU  - Katja Höflich
AU  - Krzysztof Mackosz
AU  - Chinmai S. Jureddy
AU  - Aleksei Tsarapkin
AU  - Ivo Utke
PY  - 2024
UR  - https://arxiv.org/abs/2405.07617
ID  - 2405.07617
ER  -