@misc{indiciae8cf5607e65e9,
  title = {Reducing the oxygen contamination in conductive (Ti,Zr)N coatings via RF-bias assisted reactive sputtering},
  author = {K. Thorwarth and M. Watroba and O. Pshyk and S. Zhuk and J. Patidar and J. Schwiedrzik and J. Sommerhäuser and L. Sommerhäuser and S. Siol},
  year = {2024},
  url = {https://arxiv.org/abs/2405.07789},
  note = {Source identifier: 2405.07789}
}