@misc{indiciae534d32026426, title = {High quality CVD deposition of Ge layers for Ge/SiGe Quantum Well heterostructures}, author = {Arianna Nigro and Eric Jutzi and Nicolas Forrer and Andrea Hofmann and Gerard Gadea and Ilaria Zardo}, year = {2024}, doi = {10.1103/physrevmaterials.8.066201}, url = {https://arxiv.org/abs/2405.08214}, note = {Source identifier: 2405.08214} }