@misc{indiciaec2fe70b0f670,
  title = {Efficient Bilevel Source Mask Optimization},
  author = {Guojin Chen and Hongquan He and Peng Xu and Hao Geng and Bei Yu},
  year = {2024},
  url = {https://arxiv.org/abs/2405.09548},
  note = {Source identifier: 2405.09548}
}