@misc{indiciaed4bf82c33858,
  title = {Residual Stress Development in Lattice Mismatched Epitaxial Thin Films via Atomic and Molecular Layer Depositions},
  author = {Musanna Galib and Okan K. Orhan and Jian Liu and Mauricio Ponga},
  year = {2024},
  doi = {10.1016/j.jmps.2024.105897},
  url = {https://arxiv.org/abs/2405.10384},
  note = {Source identifier: 2405.10384}
}