TY  - RPRT
TI  - Residual Stress Development in Lattice Mismatched Epitaxial Thin Films via Atomic and Molecular Layer Depositions
AU  - Musanna Galib
AU  - Okan K. Orhan
AU  - Jian Liu
AU  - Mauricio Ponga
PY  - 2024
DO  - 10.1016/j.jmps.2024.105897
UR  - https://arxiv.org/abs/2405.10384
ID  - 2405.10384
ER  -