@misc{indiciae0a7cc0949711, title = {CMOS-Compatible, AlScN-Based Integrated Electro-Optic Modulator}, author = {Valerie Yoshioka and Jicheng Jin and Haiqi Zhou and Zichen Tang and Roy H. Olsson III and Bo Zhen}, year = {2024}, url = {https://arxiv.org/abs/2405.11102}, note = {Source identifier: 2405.11102} }