@misc{indiciae95a763578880,
  title = {Machine Learning Force Field for Thermal Oxidation of Silicon},
  author = {Lukas Cvitkovich and Franz Fehringer and Christoph Wilhelmer and Diego Milardovich and Dominic Waldhör and Tibor Grasser},
  year = {2024},
  doi = {10.1063/5.0220091},
  url = {https://arxiv.org/abs/2405.13635},
  note = {Source identifier: 2405.13635}
}