TY  - RPRT
TI  - Machine Learning Force Field for Thermal Oxidation of Silicon
AU  - Lukas Cvitkovich
AU  - Franz Fehringer
AU  - Christoph Wilhelmer
AU  - Diego Milardovich
AU  - Dominic Waldhör
AU  - Tibor Grasser
PY  - 2024
DO  - 10.1063/5.0220091
UR  - https://arxiv.org/abs/2405.13635
ID  - 2405.13635
ER  -