@misc{indiciae585612e7ee0c,
  title = {Structural, electronic, and optical properties of 6H-SiC layers synthesized by implantation of carbon ions into silicon},
  author = {D. W. Boukhvalov and D. A. Zatsepin and D. Yu. Biryukov and Yu. V. Shchapova and N. V. Gavrilov and A. F. Zatsepin},
  year = {2024},
  url = {https://arxiv.org/abs/2405.18049},
  note = {Source identifier: 2405.18049}
}