TY  - RPRT
TI  - Structural, electronic, and optical properties of 6H-SiC layers synthesized by implantation of carbon ions into silicon
AU  - D. W. Boukhvalov
AU  - D. A. Zatsepin
AU  - D. Yu. Biryukov
AU  - Yu. V. Shchapova
AU  - N. V. Gavrilov
AU  - A. F. Zatsepin
PY  - 2024
UR  - https://arxiv.org/abs/2405.18049
ID  - 2405.18049
ER  -