@misc{indiciae5631b05c0a6d, title = {Discovering deposition process regimes: leveraging unsupervised learning for process insights, surrogate modeling, and sensitivity analysis}, author = {Geremy Loachamín Suntaxi and Paris Papavasileiou and Eleni D. Koronaki and Dimitrios G. Giovanis and Georgios Gakis and Ioannis G. Aviziotis and Martin Kathrein and Gabriele Pozzetti and Christoph Czettl and Stéphane P. A. Bordas and Andreas G. Boudouvis}, year = {2024}, url = {https://arxiv.org/abs/2405.18444}, note = {Source identifier: 2405.18444} }