TY  - RPRT
TI  - Discovering deposition process regimes: leveraging unsupervised learning for process insights, surrogate modeling, and sensitivity analysis
AU  - Geremy Loachamín Suntaxi
AU  - Paris Papavasileiou
AU  - Eleni D. Koronaki
AU  - Dimitrios G. Giovanis
AU  - Georgios Gakis
AU  - Ioannis G. Aviziotis
AU  - Martin Kathrein
AU  - Gabriele Pozzetti
AU  - Christoph Czettl
AU  - Stéphane P. A. Bordas
AU  - Andreas G. Boudouvis
PY  - 2024
UR  - https://arxiv.org/abs/2405.18444
ID  - 2405.18444
ER  -