@misc{indiciaee34dba467950,
  title = {Silicon-integrated scandium-doped aluminum nitride electro-optic modulator},
  author = {Tianqi Xu and Yushuai Liu and Yuanmao Pu and Yongxiang Yang and Qize Zhong and Xingyan Zhao and Yang Qiu and Yuan Dong and Tao Wu and Shaonan Zheng and Ting Hu},
  year = {2024},
  url = {https://arxiv.org/abs/2405.18717},
  note = {Source identifier: 2405.18717}
}