@misc{indiciae73360f80ece6,
  title = {Study on layout of double rotated serpentine springs for vertical-comb-driven torsional micromirror},
  author = {Biyun Ling and Yuhu Xia and Minli Cai and Xiaoyue Wang and Yaming Wu},
  year = {2024},
  url = {https://arxiv.org/abs/2406.03038},
  note = {Source identifier: 2406.03038}
}