TY  - RPRT
TI  - Study on layout of double rotated serpentine springs for vertical-comb-driven torsional micromirror
AU  - Biyun Ling
AU  - Yuhu Xia
AU  - Minli Cai
AU  - Xiaoyue Wang
AU  - Yaming Wu
PY  - 2024
UR  - https://arxiv.org/abs/2406.03038
ID  - 2406.03038
ER  -