@misc{indiciaedf46c79daefc,
  title = {Photoemission Spectroscopy on photoresist materials: A protocol for analysis of radiation sensitive materials},
  author = {Faegheh S. Sajjadian and Laura Galleni and Kevin M. Dorney and Dhirendra P. Singh and Fabian Holzmeier and Michiel J. van Setten and Stefan De Gendt and Thierry Conard},
  year = {2024},
  doi = {10.1116/6.0002808},
  url = {https://arxiv.org/abs/2406.05148},
  note = {Source identifier: 2406.05148}
}