@misc{indiciaee0dd238fd917,
  title = {Compact low-half-wave-voltage thin film lithium niobate electro-optic phase modulator fabricated by photolithography assisted chemo-mechanical etching},
  author = {Lang Gao and Youting Liang and Jinming Chen and Jianping Yu and Jia Qi and Lvbin Song and Jian Liu and Zhaoxiang Liu and Hongxin Qi and Ya Cheng},
  year = {2024},
  url = {https://arxiv.org/abs/2406.08744},
  note = {Source identifier: 2406.08744}
}