TY - RPRT TI - Compact low-half-wave-voltage thin film lithium niobate electro-optic phase modulator fabricated by photolithography assisted chemo-mechanical etching AU - Lang Gao AU - Youting Liang AU - Jinming Chen AU - Jianping Yu AU - Jia Qi AU - Lvbin Song AU - Jian Liu AU - Zhaoxiang Liu AU - Hongxin Qi AU - Ya Cheng PY - 2024 UR - https://arxiv.org/abs/2406.08744 ID - 2406.08744 ER -