@misc{indiciaefb8c22ee8d49,
  title = {Integration of through-sapphire substrate machining with superconducting quantum processors},
  author = {Narendra Acharya and Robert Armstrong and Yashwanth Balaji and Kevin G Crawford and James C Gates and Paul C Gow and Oscar W Kennedy and Renuka Devi Pothuraju and Kowsar Shahbazi and Connor D Shelly},
  year = {2024},
  url = {https://arxiv.org/abs/2406.09930},
  note = {Source identifier: 2406.09930}
}