TY  - RPRT
TI  - Integration of through-sapphire substrate machining with superconducting quantum processors
AU  - Narendra Acharya
AU  - Robert Armstrong
AU  - Yashwanth Balaji
AU  - Kevin G Crawford
AU  - James C Gates
AU  - Paul C Gow
AU  - Oscar W Kennedy
AU  - Renuka Devi Pothuraju
AU  - Kowsar Shahbazi
AU  - Connor D Shelly
PY  - 2024
UR  - https://arxiv.org/abs/2406.09930
ID  - 2406.09930
ER  -