@misc{indiciae1fe1842aed2e, title = {Evaluating Metal-Organic Precursors for Focused Ion Beam Induced Deposition through Solid-Layer Decomposition Analysis}, author = {Benedykt R. Jany and Katarzyna Madajska and Aleksandra Butrymowicz-Kubiak and Franciszek Krok and Iwona B. SzymaƄska}, year = {2025}, doi = {10.3762/bjnano.16.135}, url = {https://arxiv.org/abs/2406.10022}, note = {Source identifier: 2406.10022} }