TY  - RPRT
TI  - Evaluating Metal-Organic Precursors for Focused Ion Beam Induced Deposition through Solid-Layer Decomposition Analysis
AU  - Benedykt R. Jany
AU  - Katarzyna Madajska
AU  - Aleksandra Butrymowicz-Kubiak
AU  - Franciszek Krok
AU  - Iwona B. Szymańska
PY  - 2025
DO  - 10.3762/bjnano.16.135
UR  - https://arxiv.org/abs/2406.10022
ID  - 2406.10022
ER  -