@misc{indiciae092b89a3b5da,
  title = {Stress-Dependent Optical Extinction in LPCVD Silicon Nitride Measured by Nanomechanical Photothermal Sensing},
  author = {Kostas Kanellopulos and Robert G. West and Stefan Emminger and Paolo Martini and Markus Sauer and Annette Foelske and Silvan Schmid},
  year = {2024},
  doi = {10.1021/acs.nanolett.4c02902},
  url = {https://arxiv.org/abs/2406.14222},
  note = {Source identifier: 2406.14222}
}