TY  - RPRT
TI  - Stress-Dependent Optical Extinction in LPCVD Silicon Nitride Measured by Nanomechanical Photothermal Sensing
AU  - Kostas Kanellopulos
AU  - Robert G. West
AU  - Stefan Emminger
AU  - Paolo Martini
AU  - Markus Sauer
AU  - Annette Foelske
AU  - Silvan Schmid
PY  - 2024
DO  - 10.1021/acs.nanolett.4c02902
UR  - https://arxiv.org/abs/2406.14222
ID  - 2406.14222
ER  -