@misc{indiciae76c10933d024,
  title = {Foundry compatible, efficient wafer-scale manufacturing of ultra-low loss, high-density Si\$\_3\$N\$\_4\$ photonic integrated circuits},
  author = {Xinru Ji and Rui Ning Wang and Yang Liu and Johann Riemensberger and Zheru Qiu and Tobias J. Kippenberg},
  year = {2024},
  doi = {10.1364/optica.529673},
  url = {https://arxiv.org/abs/2406.14296},
  note = {Source identifier: 2406.14296}
}