@misc{indiciae61464f544b9e,
  title = {Nanopatterning of multicomponent van der Waals heterostructures using atomic force microscopy},
  author = {A. L. Shilov and L. Elesin and A. Grebenko and V. I. Kleshch and M. A. Kashchenko and I. Mazurenko and E. Titova and E. Zharkova and D. S. Yakovlev and K. S. Novoselov and D. A. Ghazaryan and V. Dremov and D. A. Bandurin},
  year = {2024},
  url = {https://arxiv.org/abs/2406.16354},
  note = {Source identifier: 2406.16354}
}