@misc{indiciae62b9a7424580, title = {Wafer-Scale Fabrication of InGaP-on-Insulator for Nonlinear and Quantum Photonic Applications}, author = {Lillian Thiel and Joshua E. Castro and Trevor J. Steiner and Catherine L. Nguyen and Audrey Pechilis and Liao Duan and Nicholas Lewis and Garrett D. Cole and John E. Bowers and Galan Moody}, year = {2024}, url = {https://arxiv.org/abs/2406.18788}, note = {Source identifier: 2406.18788} }