@misc{indiciae966c066b4c13,
  title = {Nonvolatile Silicon Photonic MEMS Switch Based on Centrally-Clamped Stepped Bistable Mechanical Beams},
  author = {Qian Ma and Yinpeng Hu and Ye Lu and Yunzhi Liu and Huan Li and Daoxin Dai},
  year = {2024},
  url = {https://arxiv.org/abs/2407.00070},
  note = {Source identifier: 2407.00070}
}