TY  - RPRT
TI  - Nonvolatile Silicon Photonic MEMS Switch Based on Centrally-Clamped Stepped Bistable Mechanical Beams
AU  - Qian Ma
AU  - Yinpeng Hu
AU  - Ye Lu
AU  - Yunzhi Liu
AU  - Huan Li
AU  - Daoxin Dai
PY  - 2024
UR  - https://arxiv.org/abs/2407.00070
ID  - 2407.00070
ER  -