@misc{indiciae3d808722f88c, title = {Fabrication of low-loss lithium niobate on insulator waveguides on the wafer scale}, author = {Mohammadreza Younesi and Thomas Kasebier and Ilia Elmanov and Yang-Teng Li and Pawan Kumar and Reinhard Geiss and Thomas Siefke and Falk Eilenberger and Frank Setzpfandt and Uwe Zeitner and Thomas Pertsch}, year = {2024}, url = {https://arxiv.org/abs/2407.09208}, note = {Source identifier: 2407.09208} }