@misc{indiciaeb068693474f9,
  title = {Demonstration of Si-doped Al-rich thin regrown Al(Ga)N films on AlN on sapphire templates with \$\textbackslash{}gt10\textasciicircum{}\{15\}/cm\textasciicircum{}3\$ free carrier concentration using close-coupled showerhead MOCVD reactor},
  author = {Swarnav Mukhopadhyay and Parthasarathy Seshadri and Mobinul Haque and Shuwen Xie and Ruixin Bai and Surjava Sanyal and Guangying Wang and Chirag Gupta and Shubhra S. Pasayat},
  year = {2024},
  url = {https://arxiv.org/abs/2407.10342},
  note = {Source identifier: 2407.10342}
}