TY  - RPRT
TI  - Demonstration of Si-doped Al-rich thin regrown Al(Ga)N films on AlN on sapphire templates with $\gt10^{15}/cm^3$ free carrier concentration using close-coupled showerhead MOCVD reactor
AU  - Swarnav Mukhopadhyay
AU  - Parthasarathy Seshadri
AU  - Mobinul Haque
AU  - Shuwen Xie
AU  - Ruixin Bai
AU  - Surjava Sanyal
AU  - Guangying Wang
AU  - Chirag Gupta
AU  - Shubhra S. Pasayat
PY  - 2024
UR  - https://arxiv.org/abs/2407.10342
ID  - 2407.10342
ER  -