@misc{indiciae269f7a7c812d, title = {Double Etch Method for the Fabrication of Nanophotonic Devices from Van der Waals Materials}, author = {Otto Cranwell Schaeper and Lesley Spencer and Dominic Scognamiglio and Waleed El-Sayed and Benjamin Whitefield and Jake Horder and Nathan Coste and Paul Barclay and Milos Toth and Anastasiia Zalogina and Igor Aharonovich}, year = {2024}, url = {https://arxiv.org/abs/2407.13475}, note = {Source identifier: 2407.13475} }