@misc{indiciaec3d08d4f2c8e, title = {Experimental Demonstration of Efficient and Polarization-Diversity Fiber-Chip Coupling by 2D Grating Couplers with 193-nm DUV Lithography}, author = {Wu Zhou and Kaihang Lu and Shijie Kang and Xiaoxiao Wu and Yeyu Tong}, year = {2025}, url = {https://arxiv.org/abs/2407.14432}, note = {Source identifier: 2407.14432} }